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Presentation Hall ICM - Internationales Congress Center München SEMICON EUROPA > Fab Management Forum > Session 3: Poster session - Shop Floor Innovations with Immediate Payback
15:50-15:55 h | ICM - Internationales Congress Center München ICM Room 14c, 1st Floor
Subjects: SEMICON EUROPA
In today’s approaching industry 4.0 with its highly automated process chaining, anyrequired maintenance and downtime is crucial to a tool’s expected performance – especiallyin the semiconductor world. However, the estimated costs of damages to material orequipment make a preventive maintenance even more valuable – hence the ability topredict potential failures is a key advantage.But since a tool is just one link in a process chain, the downtime will have effect on theentire chain. This requires the creation of predictive maintenance models that represent alltools within the process chain – or at least its critical path. These models’ information shallbe used for providing an overview of the tool’s state including its healthiness.In many cases a tool’s software does already provide some of the required data inapplication-specific log files. The combination of this data along with additional externalsensor output provide a viable source for learning an AI in order to visualize the results in ashopfloor and to schedule the optimal maintenance windows for minimizing the overalldowntime.
Christoph Kluge, CEO of tepcon GmbH, has been developing software solutions for over 20years. In 2002 he founded the technology and consulting company tepcon GmbH, an AP&Saffiliated company. In 2017 he took over the position as Director Software Development atAP&S.