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Automated Hardware Diagnosis and Qualification

NOV
12
2019
12. NOV 2019

Presentation Hall ICM - Internationales Congress Center München SEMICON EUROPA > Fab Management Forum > Session 2: Manufacturing Excellence - The Next Stage!

14:35-15:00 h | ICM - Internationales Congress Center München ICM Room 14c, 1st Floor

Subjects: SEMICON EUROPA

Type: Presentation

Speech: English

One common challenge for Analog Wafer Fabs is the large variety of technologies, processes and products. Due to the long lifetime of analog products the product-mix and therefore the complexity of manufacturing processes typically increases over the years. This high complexity leads, together with usually mature toolsets, to a growing risk of misprocessing due to equipment weakness or failure. Based on these challenges and in light of increasing automation of production processes, we have developed a novel automatic hardware qualification scheme for crucial hardware functionalities.Our method allows to test and qualify vacuum integrity, plasma and gas flow parameters without any human interaction. It can either be run alongside regular process qualifications or while the tool and chambers are idle to assure maximum tool availability. The universal setup allows the implementation on fundamentally different toolsets like dielectric deposition or metal etch without any modification of the underlying routine. The high data density and coverage of this monitoring scheme facilitates root-cause analysis and the vast number of available small signals enables proactive reaction to upcoming failures.In this presentation, the implementation and data collection as well as the impact on the manufacturing and tool stability will be presented and discussed.

Informations

Dr. Michael Enzelberger-Heim

Dr. Michael Enzelberger-Heim is currently working as a process engineer in the Plasma/Thinfilm module of TI’s Freising Fab, responsible for PECVD, SACVD and ALD processes.Starting as a trainee at TI in 2014, Michael held different positions in product and process engineering. In 2018, he has been elected member of the group technical staff.Michael studied physics in Erlangen and Grenoble and holds a PHD in experimental physics from the FAU Erlangen in the field of Synthetic Carbon Allotropes.

Dr. Michael Enzelberger-Heim
Process Engineer

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