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Innovations to Enable Industry 4.0 for Semiconductor Process Tools

NOV
12
2019
12. NOV 2019

Presentation Halle ICM - Internationales Congress Center München SEMICON EUROPA > Fab Management Forum > Session 3: Poster session - Shop Floor Innovations with Immediate Payback

15:55-16:00 Uhr | ICM - Internationales Congress Center München ICM Room 14c, 1st Floor

Themen: SEMICON EUROPA

Format: Presentation

Sprache: Englisch

Increasing costs and increasingly advanced semiconductor manufacturing have created a strong incentive to enable smart manufacturing, where the use of more sensors, more data with machine learning software has the potential to increase productivity and process performance.There are significant challenges to be able to achieve this goal such as infrastructure, specialized machine learning and organizational challenges to connect data science with process and tool knowledge.Historically semiconductor manufacturing solutions around tool data and tool control have been implemented as fab-wide solutions. To achieve the level of performance demanded, by the objectives of smart manufacturing, will require a secular change where tool type specific solutions will supplement the fab-wide systems, as the level of specialization required means a ‘one-size-fits-all’ approach is inadequate.Existing solutions for advanced tool data analytics face a critical challenge as the data science and computer science approaches lack the critical element of applied tool knowledge. What is needed is a way to enable richer tool data and machine learning that adapts to new complex process flows and a common platform that brings together the data teams, the process teams and the tool experts.This paper will illustrate these challenges and a solution, with use case examples that show how smart manufacturing is being enabled for process tools from Lam Research.

Informationen

Marcello Della Pia

Mr Della Pia is a semiconductor professional with 24 years experience in the high-tech industry. He started his career working for Texas Instruments and when the DRAM division was acquired by Micron Technology he continued his career with them. In 2000 he moved to China and being amongst the first to join the foundation of the first cutting-edge IC foundry in China (SMIC), played an active role in the construction of the semiconductor industry on the mainland. Whilst at SMIC, Mr Della Pia progressed to various leadership roles across multiple fabs. In 2013, he joined Lam Research and is currently Director in Lam’s Customer Support Business Group, responsible for EMEA Installed Base Operations and for the Big Data project in the EMEA region. Mr Della Pia holds an M.Sc. in Chemical Engineering.

Marcello Della Pia
IT Installed Base Director

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