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Presentation Halle B1 SEMICON EUROPA > TechARENA 1 & 2 - Technological Platform for Innovation > MEMS along the Value Chain
14:45-15:05 Uhr | Halle B1 Tech Arena 1, Booth B1.175
Themen: SEMICON EUROPA
Instruments for analysis and 3D visualization of dynamic response and static shape are key for developing MEMS. They are indispensable for validating FE calculations, determining cross-talk effects and measuring surface topography and deformation.State of the art metrology solutions as the new Polytec MSA-600 Micro System Analyzer combine several measurement techniques into a convenient “All-in-One” solution for 3D motion analysis and surface metrology. This instrument delivers increased measurement flexibility, bandwidth and precision, adapting to the needs of today’s and tomorrow’s microstructures.When incorporated in the MEMS design and test cycle, the Micro System Analyzer provides instant frequency response plots of periodic motions and precise time response plots of transient motions useful for increasing device performance. This reduces development and manufacturing costs by shortening design cycles, simplifying trouble shooting and improving yield.
Since 2017, Product Manager at Polytec GmbH, responsible for Laser Doppler Vibrometry and Surface Topography in microstructure applications.2013-2017, Product Manager at EV Group E. Thallner GmbH, responsible for inspections systems for overlay and topography in the semiconductor production.2008-2013, research assistant at the Institute for Microstructure Technology, Karlsruhe Institute of Technology (KIT), with focus on micro- and nano replication, equipment design and measurement technology.2008 Interdisciplinary diploma, Dipl.-Ing. Mechatronics, from the faculties of electrical and mechanical engineering, University of Karlsruhe.