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A Roadmap for the future inline control and yield management in MEMS production

NOV
13
2019
13. NOV 2019

Presentation Halle B1 SEMICON EUROPA > TechARENA 1 & 2 - Technological Platform for Innovation > MEMS along the Value Chain

14:25-14:45 Uhr | Halle B1 Tech Arena 1, Booth B1.175

Themen: SEMICON EUROPA

Format: Presentation

Sprache: Englisch

The International Roadmap for Devices and Systems (IRDS) initiative focuses on maintaining a 15 year roadmap leveraging work of roadmap teams closely aligned with the advancement of the devices and systems industries. Led by an international roadmap committee (IRC), International Focus Teams (IFTs) collaborate in the development of a roadmap to help ensure alignment and consensus across a range of stakeholders. The IRDS roadmap is separated into chapters. Within the chapter of Yield Enhancement the specific requirements on inline control and yield management of MEMS production is described.New inspection and characterization challenges are generated in the production of MEMS specific technologies, devices and materials. Those cannot be covered with the existing mainstream solutions and need new innovation and solutions.These new techniques are mainly not yet available on production reliable level. Development of trend-setting methods and furthermore adaption to productive level are necessary.The roadmap describes all MEMS related requirements like wafer thickness handling, task specific inspection challenges, CD measurement, aspect ratio and material related challenges.

Informationen

Ines Thurner

•CONVANIT• Qimonda Dresden•Infineon Technologies Munich• Infineon Technologies USA• SMST GmbH Stuttgart• IBM GmbH StuttgartMaster in Physics, 1989, University of Karlsruhe

Ines Thurner
CEO

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