ALD Lab Saxony Symposium

Nov
14
2017

SEMICON forums > Side Events

14. Nov 2017
10:00-15:00 h  |  Conference Room A12​

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Subjects: 

SEMICON Europa

Type:
Special event
Speech: English

The ALD Lab Saxony Symposium is a yearly side event of the SEMICON Europe organized since 2012.
The Symposium is intended to improve visibility of the Atomic Layer Deposition technique and its capabilities and to increase the networking within the ALD community.
The given talks show an overview of various research and development topics as well as examples of ALD applications in manufacturing.
This year’s agenda combines talks from ALD Lab Saxony members and partners from academia and industry on ALD equipment, applications, metrology and simulations.

10:00 to 12:00 Equipment and Applications

10:00        “Welcome”, Prof. Bartha, TU Dresden (Germany)

10:20        „ALD for Production“,  Dr. Christoph Hossbach, Picosun Oy (Finland)

10:40       „Precursor supply chain support“, Dr Simon Rushworth, EpiValence (UK)

11:00        "Fabrication of 3D microstructures from micron-sized powder using ALD and possible applications for MEMS",  Dr. Thomas Lisec, Fraunhofer ISIT (Germany)

11:20        “Passivation, Capacitors or 3D-Structures – Outline the Possibilities of ALD”,  Dr. Dorothee Dietz, Fraunhofer IMS (Germany)

11:40        title to be given,  Dr. Diane Scott, TECHCET LLC (USA)

12:00 to 13:00 Lunch and Networking

13:00 to 15:00 Precursors, Precursor Delivery, Metrology and Simulations

13:00        “ALD equipment and precursors for high volume manufacturing”,  Dr. Jonas Sundqvist, Fraunhofer IKTS (Germany)

13:20        “Electronics: a key market for Umicore - a key partner for the market”,  Oliver Briel, Umicore (Germany)

13:40        „In-situ metrology for ALD“,  Martin Knaut, TU Dresden (Germany)

14:00        “Precursor systems delivery for ALD”,  n.n., SEMPA Systems GmbH (Germany)

14:20        title to be given, n.n., Veeco CNT (USA)

14:40        “ALD process optimization using computational fluid dynamics”,  Linda Jäckel, Fraunhofer ENAS (Germany)


 
 
 
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Final report

That was productronica 2017

Full halls, constructive discussions and positive feedback. Experience the highlights of the 2017 exhibition all over again.

That was productronica 2017

Full halls, constructive discussions and positive feedback. Experience the highlights of the 2017 exhibition all over again.

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